发明名称 MANUFACTURING METHOD FOR PHOTOELECTRIC CONVERSION APPARATUS AND PHOTOELECTRIC CONVERSION APPARATUS
摘要 A manufacturing method for a photoelectric conversion apparatus in which a microlens is arranged for multiple electric charge accumulation regions formed on a semiconductor substrate, includes forming a first impurity region of a first conductive type on the semiconductor substrate; and forming a second impurity region of a second conductive type that is opposite the first conductive type in a part of the first impurity region to isolate the first impurity region into multiple regions such that each of the multiple electric charge accumulation regions includes isolated first impurity regions.
申请公布号 US2015145087(A1) 申请公布日期 2015.05.28
申请号 US201414548153 申请日期 2014.11.19
申请人 CANON KABUSHIKI KAISHA 发明人 Iwata Junji
分类号 H01L27/146 主分类号 H01L27/146
代理机构 代理人
主权项 1. A manufacturing method for a photoelectric conversion apparatus in which a microlens is arranged for multiple electric charge accumulation regions formed on a semiconductor substrate, the method comprising: forming a first impurity region of a first conductive type on the semiconductor substrate; and forming a second impurity region of a second conductive type that is opposite the first conductive type in a part of the first impurity region to isolate the first impurity region into multiple regions such that each of the multiple electric charge accumulation regions includes isolated first impurity regions.
地址 Tokyo JP