发明名称 TRANSISTOR MANUFACTURING METHOD AND TRANSISTOR
摘要 This transistor manufacturing method has the following steps: a step in which a fluorine-containing resin is used to form a first insulator layer (10) that covers a semiconductor layer (9) on a substrate (2) that also has a source electrode (6) and a drain electrode (7); a step in which a second insulator layer (11) is formed so as to cover the first insulator layer (10); a step in which a base film (12) is formed on at least part of the surface of the second insulator layer (11); and a step in which a metal that serves as an electroless catalyst is deposited onto the surface of the base film (12) and electroless plating is then used to form a gate electrode on the surface of the base film. The step in which the base film (12) is formed is performed by coating the surface of the second insulator layer (11) with a liquid (12S) that forms the base film (12), and the second insulator layer (11) exhibits higher affinity for said liquid (12S) than the first insulator layer (10) does.
申请公布号 WO2015076334(A1) 申请公布日期 2015.05.28
申请号 WO2014JP80769 申请日期 2014.11.20
申请人 NIKON CORPORATION 发明人 KOIZUMI SHOHEI;SUGIZAKI TAKASHI;KAWAKAMI YUSUKE
分类号 H01L21/336;C23C18/31;C23C18/32;C23C28/00;H01L21/28;H01L21/288;H01L21/3205;H01L21/768;H01L29/41;H01L29/786;H01L51/05 主分类号 H01L21/336
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