发明名称 CHEMICAL FILTER
摘要 <p>PROBLEM TO BE SOLVED: To provide a chemical filter for silanol compound removal which can remove a silanol compound in the air efficiently.SOLUTION: A chemical filter for silanol compound removal is characterized by using, as an absorbent, an inorganic silica porous material which has 7 or less of the pH of a mixture (content: 5 wt%) when mixed with pure water.</p>
申请公布号 JP2015098020(A) 申请公布日期 2015.05.28
申请号 JP20140209035 申请日期 2014.10.10
申请人 NITTA IND CORP 发明人 SHIGETA MAKOTO;OSHIO MINORU
分类号 B01D53/04;B01J20/02;B01J20/10;B01J20/12;B01J20/14;B01J20/16;B01J20/18;B01J20/28;H01L21/027 主分类号 B01D53/04
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