COMPENSATING APPARATUS FOR LASER LINE BEAM AND COMPENSATING METHOD BY USING IT

摘要

The present invention relates to a laser beam correcting device and a laser beam correcting method. The laser beam correcting device comprises; a laser light source which irradiates laser; an output end reflection mirror which reflects the laser beam irradiated from the laser light source in a substrate; one or more correcting lenses included in the front side of the output end reflection mirror of an output direction of the laser beam; a correcting system which collects profile data of a residual laser line beam which is transmitted from the output end reflection mirror; and a controller which controls the movement of the correcting lens according to the change of the line beam profile data collected from the correcting system. The line beam profile data of the residual laser beam which transmits a reflection mirror among laser beams is collected. If the line beam profile data collected in a process which compares the collected line beam profile data with an existing line beam profile data is different with a value of the an existing line beam profile data, the coordination of an optical system for the correction of the laser line beam is not required and the correction time of the laser line beam profile can be reduced by performing processes which calculate change amounts of the changed line beam profile data and correct a profile of the laser line beam according to the change amounts. Moreover, the efficiency of the process can be increased by suppressing the generation of an error of an irradiation position of the laser line beam to an object and reducing a fraction defective of the object.