SUSCEPTOR

摘要

The invention relates to a susceptor which is for the processing chamber of protective gas and vacuum high-temperature processing installations and consists of graphite or CFC, has a tunnel-like design, and can be closed by a cover at both its ends. The invention should allow the provision of a flexibly and modularly extendable susceptor that has a material-saving design and, in particular, uniform thermal expansion. This is achieved by virtue of the fact that said susceptor (1) consists of a plurality of modules (2) aligned one next to the other along a continuous tunnel, that each module (2) consists of a tubular section (3) and a base panel (4) fixed thereto, and that the end faces (5) between each pair of modules (2) are interconnected in a form-fitting manner.

主权项

1. A susceptor made from graphite or CFC for the process space of protective-gas and vacuum high-temperature process installations, which is of tunnel-like design and can be closed at each of its two ends by means of a cover, characterized in that the susceptor is composed of a plurality of modules which are lined up with one another longitudinally into a continuous tunnel and which are firmly connected to one another positively and nonpositively, in that each module is composed of a tubular portion and of a baseplate screwed thereto, and in that the end faces between two modules in each case are connected to one another positively, all the components of a module being cut from the same blank.