CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD OF FABRICATING THE SAME

摘要

Disclosed are a capacitive micromachined ultrasonic transducer and a manufacturing method thereof. The disclosed ultrasonic transducer includes a device substrate which includes a first trench which divides each element into a plurality of first parts and a second trench which is separated from the first trench, a support stand which limits a plurality of cavities corresponding to each element on the device substrate, a membrane which covers the cavities on the support stand, and a top electrode which is electrically connected to a second part in the second trench on the membrane through a hole which passes through the support stand and the membrane.