| 发明名称 |
SUBSTRATE HEATING PEDESTAL HAVING CERAMIC BALLS |
| 摘要 |
A substrate heating pedestal for a process chamber for processing substrates is described. The pedestal comprises an annular plate comprising a surface having an array of recesses. A plurality of ceramic balls are each positioned in a recess on the surface of the annular plate to define a substrate receiving surface. A heating element is embedded in the annular plate. |
| 申请公布号 |
US2015144263(A1) |
申请公布日期 |
2015.05.28 |
| 申请号 |
US201514613219 |
申请日期 |
2015.02.03 |
| 申请人 |
RIKER Martin;WANG Wei W. |
发明人 |
RIKER Martin;WANG Wei W. |
| 分类号 |
H01J37/32;H01L21/67 |
主分类号 |
H01J37/32 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A substrate heating pedestal for a process chamber for processing substrates, the substrate heating pedestal comprising:
(a) an annular plate comprising a surface having an array of recesses; (b) a plurality of ceramic balls, each ceramic ball being positioned in a recess on the surface of the annular plate to define a substrate receiving surface; and (c) a heating element embedded in the annular plate. |
| 地址 |
Milpitas CA US |
