| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an apparatus and a method for growing a crystal, capable of inhibiting separation of a seed crystal from a holding member. <P>SOLUTION: The apparatus for growing the crystal grows a silicon carbide crystal by bringing the lower surface 4B of the seed crystal 4 comprising silicon carbide fixed to the lower end surface 2A of the holding member 2 through an adhesive member 3 into contact with the fused liquid of silicon carbide in a crucible to grow the crystal of silicon carbide on the lower surface 4B from the fused liquid, wherein the holding member 2 comprises carbon, while the adhesive member 3 includes carbon and a material whose boiling point is lower than the melting point of silicon carbide, and the lower end surface 2A of the holding member 2 is a rough surface having a 5-30μm arithmetic average roughness Ra. The method for growing the crystal comprises a step for bringing the lower end surface 2A of the holding member 2 to be the rough surface, a step for applying the adhesive 3 to the lower end surface 2A and a step for fixing the seed crystal 4 to the lower end surface 2A of the holding member 2 through the adhesive 3 by bringing the seed crystal 4 into contact with the adhesive 3. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
