| 摘要 |
An atmospheric pressure plasma jet apparatus is capable of lengthening the plasma plume that can efficiently reform the surface irrespective of the surface shape of the material. An atmospheric pressure plasma jet generating means 3 generates an atmospheric pressure plasma jet 25, by using a raw material gas composed of a single kind of gas, or two or more kinds of gases that hardly react with one another in a plasma. The upper part 31 and the lower part 33 of a processing chamber as inclusion preventing means prevents an ambient gas from being included into the atmospheric pressure plasma get 25. |
