发明名称 |
MICROMECHANICAL SYSTEM HAVING SEISMIC MASS |
摘要 |
<p>A micromechanical system with a system that can vibrate, has a seismic mass and at least two spring elements. The spring elements are respectively fastened on one side externally to the seismic mass and on the other side to fixed anchor points of the micromechanical system such that the seismic mass can vibrate in a movement direction. In order to obtain a particularly large frequency spacing between the useful mode and further vibration modes of the system, at least one further spring element is provided in the inner region of the seismic mass. The further spring element the is fastened to a further anchor point of the micromechanical system. A method builds a micromechanical system with a system that can vibrate.</p> |
申请公布号 |
EP2417053(B1) |
申请公布日期 |
2015.05.27 |
申请号 |
EP20090776537 |
申请日期 |
2009.04.07 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
FORKE, ROMAN;SCHEIBNER, DIRK;SHAPORIN, ALEXEY |
分类号 |
B81B3/00;G01H11/06;G01P15/08;G01P15/125 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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