| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a forming method of a microstructure capable of efficiently forming a shape in which a tapered shape and a vertical shape communicate with each other, and further to provide a manufacturing method of a fluid spray head. <P>SOLUTION: A microstructure comprises: a first opening 7 having a sidewall perpendicular to a substrate 1; and a second opening 10 having a sidewall in a tapered shape communicating with the first opening 7. A forming method of the microstructure comprises: a first step of forming a mask 2 provided with a through hole 5 having a stepwise structure on the substrate 1; and a second step of forming the first opening 7 and the second opening 10 by alternately and continuously repeating a dry etching step via the mask 2 and a passivation step of forming a protection film 8. In the second step, by increasing an etching amount in dry etching greater than an amount of the protection film 8 formed in passivation and by etching a bottom surface of the first opening 7 while etching a part of the substrate 1 which becomes the sidewall of the second opening 10, the sidewall of the second opening 10 is formed in the tapered shape. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
