| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibration piece which prevents disconnection of electrode patterns conductive with excitation electrodes, and further to provide a piezoelectric device and a manufacturing method of the piezoelectric vibration piece. <P>SOLUTION: In a piezoelectric vibration piece, electrode patterns 32 conductive with excitation electrodes 30 are provided at a base end 18 side for supporting a piezoelectric element plate 12 in a cantilever manner while the excitation electrodes 30 are being provided on principal surfaces 12a and 12b of the piezoelectric element plate 12. Further, in the piezoelectric vibration piece, the electrode patterns 32 are led out on portions 22 gradually becoming thinner from inside toward outside where angles between the one principal surface 12a and a lateral surface 12c and between one principal surface 12b and the lateral surface 12c of the piezoelectric element plate 12 become obtuse angles due to wet etching when an outer shape of the piezoelectric element plate 12 is formed. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
