Electric field emission x-ray tube apparatus equipped with a built-in getter

摘要

The present disclosure relates to an electric field emission x-ray tube apparatus equipped with a built-in getter, and more particularly, to an electric field emission x-ray tube apparatus equipped with a built-in getter that makes it possible to reduce the size of an x-ray tube by forming a stacked structure, with electric insulation and predetermined gaps maintained for each electrode, by manufacturing an x-ray tube having a stacked structure by inserting insulating spacers (for example, ceramic) between an exhausting port, a cathode, a gate, a focusing electrode, and an anode and bonding them with an adhesive substance, and then inserting a spacer between a field emitter on a cathode substrate and a gate hole connected with a gate electrode.

主权项

1. An electric field emission x-ray tube apparatus equipped with a built-in getter, comprising:
a cathode configured to emit electrons through a field emitter; a gate configured to apply an electric field to the field emitter through a gate electrode with a gate hole; a focusing electrode configured to focus electrons emitted from the cathode; an anode generating x-rays when the focused electrons hits on an anode target; a getter; a getter housing unit configured to activate joule heat in the getter when external voltage is applied to both ends of the getter and maintaining the degree of vacuum by using the activated getter; and an exhausting unit configured to exhaust air between the anode and the getter housing unit through an exhausting pipe, wherein the exhausting unit, the getter housing unit, the cathode, the gate, the focusing electrode, and the anode are stacked in this order and are bonded together by a plurality of spacers such that electric insulation and predetermined gaps are maintained, wherein the getter is mounted in the getter housing unit that is placed under the cathode, and wherein the getter has a strip shape.