发明名称 REAGENT FOR ENHANCING GENERATION OF CHEMICAL SPECIES
摘要 A reagent that enhances acid generation of a photoacid generator and composition containing such reagent is disclosed. Described is a reagent that generates a first chemical species in at least one of a composition including the reagent, a solution of the composition, and a film formed of the composition. Further described is a reagent that generates a first product in at least one of a composition including the reagent, a solution of the composition, and a film formed of the composition.
申请公布号 US2015141687(A1) 申请公布日期 2015.05.21
申请号 US201414547097 申请日期 2014.11.18
申请人 TOYO GOSEI CO., LTD. 发明人 MIYAZAWA Takashi
分类号 G03F7/075 主分类号 G03F7/075
代理机构 代理人
主权项 1. A reagent characterized in that the reagent is able to generate a first chemical species in at least one of a composition including the reagent, a solution of the composition, and a film formed of the composition.
地址 INZAI-SHI JP