摘要 |
A reagent that enhances acid generation of a photoacid generator and composition containing such reagent is disclosed. Described is a reagent that generates a first chemical species in at least one of a composition including the reagent, a solution of the composition, and a film formed of the composition. Further described is a reagent that generates a first product in at least one of a composition including the reagent, a solution of the composition, and a film formed of the composition. |