| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device that facilitate alignment of an optical imaging system.SOLUTION: A radiation beam 30 is emitted from one end of an imaging system 12 along an alignment axis 14. In a direction of beam propagation, a pair of diaphragm elements 24 and 26 are disposed behind the imaging system 12, and apertures of the diaphragm elements are each covered by a piece of a material transparent to radiation light, and the piece of the material carries a plurality of sensor elements arranged in a matrix. The sensor elements furnish information about measured radiation intensity to a signal processing unit 42, and the signal processing unit graphically illustrates a current alignment status of the imaging system 12 on a monitor 44 and/or performs an automatic adjustment of the imaging system 12. |
