METHODOLOGY FOR IMPROVED ADHESION FOR DEPOSITED FLUORINATED TRANSPARENT CONDUCTING OXIDE FILMS ON A SUBSTRATE

摘要

A method and device for improving the adhesion of fluorinated transparent conducting oxide films by incorporating a non-conducting, non-fluorinated adhesion layer between a substrate and a transparent conducting oxide.

主权项

1. A device with improved adhesion of a fluorinated transparent conducting oxide layer to a substrate comprising:
a substrate; at least one non-fluorinated metal oxide thin film deposited on the substrate; and at least one halogenated transparent conducting oxide layer deposited on the thin film, wherein the non-fluorinated metal oxide film adheres the conducting oxide layer to the substrate.