METHOD OF FORMING WIRINGS

摘要

A method of manufacturing a wiring includes sequentially forming a first insulation layer, a first layer, and a second layer on a substrate, etching an upper portion of the second layer a plurality of times to form a second layer pattern including a first recess having a shape of a staircase, etching a portion of the second layer pattern and a portion of the first layer under the first recess to form a first layer pattern including a second recess having a shape of a staircase similar to the first recess, etching a portion of the first layer pattern under the second recess to form a first opening exposing a portion of a top surface of the first insulation layer, etching the exposed portion of the first insulation layer to form a second opening through the first insulation layer, and forming a wiring filling the second opening.

主权项

1. A method of manufacturing a wiring, the method comprising:
sequentially forming a first insulation layer, a first layer, and a second layer on a substrate; etching an upper portion of the second layer a plurality of times to form a second layer pattern including a first recess having a shape of a staircase in which a center portion is relatively low; etching a portion of the second layer pattern and a portion of the first layer under the first recess to form a first layer pattern including a second recess having a shape of a staircase similar to that of the first recess; etching a portion of the first layer pattern under the second recess until a top surface of the first insulation layer is exposed to form a first opening exposing a portion of the first insulation layer; etching the exposed portion of the first insulation layer to form a second opening through the first insulation layer; and forming a wiring filling the second opening.