发明名称 SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
摘要 A semiconductor device includes: active fins protruding from an active layer and extending in a first direction; a gate structure on the active fins extending in a second direction intersecting the first direction; and a spacer on at least one side of the gate structure, wherein each of the active fins includes a first region and a second region adjacent to the first direction in the first direction, and a width of the first region in the second direction is different from a width of the second region in the second direction.
申请公布号 US2015137262(A1) 申请公布日期 2015.05.21
申请号 US201414465968 申请日期 2014.08.22
申请人 Samsung Electronics Co., Ltd. 发明人 Baek Kang-Hyun;Park Sung-Hyun;Baek Sang-Hoon;Song Tae-Joong
分类号 H01L29/78;H01L27/11 主分类号 H01L29/78
代理机构 代理人
主权项 1. A semiconductor device comprising: active fins protruding from an active layer and extending in a first direction; a gate structure on the active fins and extending in a second direction intersecting the first direction; and a spacer on at least one side of the gate structure, wherein each of the active fins comprises a first region and a second region adjacent to the first region in the first direction, and a width of the first region in the second direction is different from a width of the second region in the second direction.
地址 Suwon-si KR