VACUUM PUMP AND OPERATION METHOD OF THE VACUUM PUMP

摘要

The present invention is to provide a vacuum pump capable of reducing the frequency of operation stop resulting from the occurrence of an error. The vacuum pump of the present invention comprises: a pump module (1) exhausting gas; a motor (2) driving the pump module (1); an inverter device (5) supplying alternating current power of variable frequency to the motor (2); and a control device (7) controlling the inverter device (5). The inverter device (5) stops own operation in case an error which results from an overvoltage or an overcurrent. The control device (7) restarts the inverter device (5) when the occurrence of an error is satisfied with a predetermined condition.