Method for centring a vacuum pump and/or reducing a magnetic leakage field of a vacuum pump or a rotary unit for a vacuum pump

摘要

The method involves forming a permanent magnet bearing for the mutual rotary mounting of a rotor (16) and a stator. The material-specific properties of the permanent magnetic bearing are changed based on the eccentricity state to change the bearing for reducing the magnetic field generated eccentricity. The eccentricity is measured and the change is made dependent on the measured eccentricity such that the eccentricity is reduced. The material is removed to change the magnetic field. Independent claims are included for the following: (1) a vacuum pump; and (2) a device for of centering of vacuum pump e.g. turbo molecular pump, or rotary unit.