发明名称 質量分析装置
摘要 <p>When a specimen from a specimen ionizing unit (ion source) is introduced, the specimen, if not sufficiently ionized, is caused to remain in sites other than a pore in an introducing section and then deposited as a product such as an oxide or carbide by an energy such as heat. The deposited deposit causes a deterioration in the performance of the mass spectrometry device. The present invention has a specimen supply source, a specimen ionizing section for ionizing a specimen supplied from the specimen supply source, a specimen-introduction regulating chamber into which ions of the ionized specimen are introduced, a differential evacuation chamber located at the downstream side of the specimen-introduction regulating chamber, and an analyzing section located at the downstream side of the differential evacuation chamber, in which a discharge generating means is formed for generating an electric discharge inside at least one of the specimen-introduction regulating chamber and the differential evacuation chamber. The discharge generating means has a specimen introducing section electrode and a first-pore-section-forming member (electrode) located oppositely to each other inside the specimen-introduction regulating chamber, or a first-pore-section-forming member (electrode) and a second-pore-section-forming member (electrode) located oppositely to each other inside the differential evacuation chamber.</p>
申请公布号 JP5722125(B2) 申请公布日期 2015.05.20
申请号 JP20110124764 申请日期 2011.06.03
申请人 发明人
分类号 H01J49/06;G01N27/62;H01J49/10 主分类号 H01J49/06
代理机构 代理人
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