METHOD OF MANUFACTURING A SOLID STATE ACTUATOR

摘要

A solid actuator has an actuator structural unit, a top plate and a base plate. A hollow cylinder part made of maraging steel is heated to a predetermined first temperature at which the maraging steel is in an austenitic state. A corrugated tube is shaped from the hollow cylinder part by a shaping process, while the maraging steel is still in an austenitic state. The corrugated tube is cooled such that the maraging steel is in a martensitic state. The actuator structural unit is inserted into the corrugated tube. The top plate and the base plate are fixed to the corrugated tube such that the actuator structural unit is clamped between the top plate and the base plate at a predetermined pre-tension.