COMPOSITION FOR THE FORMATION OF A PROTECTIVE THIN FILM HAVING HIGH HEAT RESISTANCE AND CHEMICAL RESISTANCE, AND METHOD FOR PREPARING A PROTECTIVE THIN FILM USING SAME

摘要

The present invention relates to a protective thin film composition having high heat resistance and chemical resistance containing a coupling compound, and to a method for preparing a protective thin film. According to the present invention, the protective thin film obtained from the protective thin film composition maintains a shape without thermal deformation even at the high temperature of more than or equal to 300°C, shows excellent chemical resistance against acid, base, or an organic solvent, and maintains a shape of an exposed surface in plasma process, thereby performing excellent functions as the protective film to a lower material.