| 摘要 |
A substrate transferring apparatus is disclosed. The substrate transferring apparatus according to an embodiment of the present invention comprises a moving table where a substrate is installed; a stage module supporting a substrate formed to be ascended and descended in a chamber and inserted, and installing the substrate on the moving table, while the substrate is inserted and then descended; and a clamping module linked with the descending movement the stage module to contacting and pressing the substrate installed on the moving table to maintain the position on the moving table. |
