| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide industrial machinery and a measuring method of an expansion/contraction quantity thereof capable of measuring accurately the expansion/contraction quantity generated by a temperature change.SOLUTION: Industrial machinery 1 includes: a movement mechanism 2a for moving relatively a probe 4 or an industrial tool and a workpiece W by using three moving shafts which are parallel respectively to orthogonal three-axis directions X, Y and Z; a low thermal expansion member 251 formed of a material having a smaller thermal expansion coefficient than a material forming components 222 and 223 of the movement mechanism 2a; and expansion/contraction quantity measuring means 252 for measuring the expansion/contraction quantity in one direction of the orthogonal three-axis directions X, Y and Z of the components 222 and 223 generated by a temperature change on the basis of the low thermal expansion member 251.</p> |
