| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a wafer for temperature measurement which allows for temperature measurement of a wafer with high sensitivity by using a wireless system, without increasing the thickness thereof, with a simple configuration.SOLUTION: A wafer W for temperature measurement includes a base substrate 11, a cover glass 12, an antenna 15 formed on a flexible printed wiring board 14, three crystal resonators 1a, 1b, 1c connected in parallel with the antenna 15 and having resonant frequencies different from each other, and a spacer. The antenna 15 formed on the flexible printed wiring board 14, three crystal resonators 1a, 1b, 1c, and spacer are surrounded fluid-tightly by the base substrate 11, cover glass 12, and a fluororesin 16.</p> |
