CHARGED PARTICLE BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a charged particle beam device capable of simultaneously cancelling a plurality of aberrations generated by non-constant distribution of energy and opening angles of the charged particle beam device.SOLUTION: A charged particle beam device includes: an aberration generation lens for generating aberration by passing charged particle beams through the outside of an axis; and a correction lens for converging the orbit on the principal surface of an objective lens without depending on energy of the charged particle beams. The principal surface of the correction lens is arranged in a crossover position where a plurality of charged particle beams having angles different from each other are converged after passing through the aberration generation lens.