DRAWING DEVICE AND METHOD FOR MANUFACTURING ARTICLE

摘要

PROBLEM TO BE SOLVED: To provide a drawing device advantageous in the aspect of overlay accuracy and throughput.SOLUTION: A drawing device which performs drawing on a substrate using a charged particle beam includes: a deflector for scanning the charged particle beam on the substrate; a movable stage which holds the substrate; and a control unit which controls main scanning by the deflector and sub-scanning by movement of the stage. The control unit controls the width of the main scanning on the basis of the width in a main scanning direction of a drawing object region on the substrate.