发明名称 APPARATUS FOR FIXING A SUBSTRATE
摘要 The present invention relates to an apparatus to fixate a substrate. According to the present invention, the apparatus to fixate the substrate wherein the substrate fixating the apparatus to fixate the substrate, an end portion of the substrate mounted when the substrate is arranged to a mask on a bottom-up deposition, comprises: a mounting unit, wherein the first inclined surface is formed in which the height is creased in a direction toward the center of the substrate to be mounted in a contact portion on which the substrate is in contact; a pressing portion to press the substrate, equipped with a flatbed, spaced apart and installed upwardly from the mounting portion; and an inclined converting unit including a projection unit providing a force to bend upwards on the substrate pressing an opposite end of the substrate, extruded from the lower portion of the pressing unit wherein an elasticity force applied to the lower is provided wherein the second inclined surface corresponding to the first inclined surface is formed, and housing the area corresponding to the contact portion inside the pressing portion. To achieve this, the opposite ends of the substrate are pressed between the mounting portion forming the first inclined surface and the inclined converting unit forming the second inclined surface; thereby the force to bend upwards on the substrate is provided, and the front surface of the substrate is pressed after applying tension to the substrate at a predetermined interval such that the apparatus to fixate the substrate in which the substrate can be fixated more precisely is provided.
申请公布号 KR101520640(B1) 申请公布日期 2015.05.18
申请号 KR20130161504 申请日期 2013.12.23
申请人 SNU PRECISION CO., LTD. 发明人 YOON, SUNG HOON;AN, KYOUN RYOUL;KIM, YEONG HO
分类号 H01L21/68;C23C14/24;C23C14/50;H01L51/56 主分类号 H01L21/68
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