| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion beam device (an ion beam microscope or a focused ion beam processing device) which allows for high resolution observation or high accuracy processing by preventing the vibration, generated in cooling means of a gas field ionization ion source, from being transmitted to cause vibration of an emitter chip.SOLUTION: An emitter chip 21 of a gas field ionization ion source is attached to a sapphire base 52. The sapphire base is connected with a refrigerating machine 71 by a copper net wire 54 and a copper cooling conduction rod 53, that is a good heat conductor. Consequently, the emitter chip is cooled down to a desired temperature. A refrigerating machine combining a GM refrigerator and helium gas spot is used. Even if the GM refrigerator vibrates, the vibration attenuates because helium gas is present in the middle, and transmitted to the emitter chip while being reduced furthermore by the copper net wire. |
