| 摘要 |
PROBLEM TO BE SOLVED: To accurately detect accelerations and angular velocities without suffering ill effects on detection results from an unfavorable environment of use and with high detection sensitivity.SOLUTION: A plate-shaped bridge part 120 and a plate-shaped bridge part 130 extend in a U shape from a plate-shaped member 110 fixed to an apparatus housing 200 to form a cantilever beam structure to whose tip a weight body 150 is connected. At the root end and the tip of the plate-shaped bridge part 120, piezo resistance elements 301 to 303 and piezo resistance elements 304 to 306 are respectively arranged, and at the root end and the tip of the plate-shaped bridge part 130, piezo resistance elements 307 to 309 and piezo resistance elements 310 to 312 are respectively arranged. By a bridge circuit combining these 12 piezo resistance elements, accelerations having worked in the directions of the x, y and z axes can be detected. If piezoelectric elements are arranged instead of the piezo resistance elements and the weight body 150 is vibrated, the angular velocity having worked around each axis can also be detected. |
