发明名称 |
METHOD FOR ETCHING METAL OR METAL OXIDE BY OZONE WATER, METHOD FOR SMOOTHING SURFACE OF METAL OR METAL OXIDE BY OZONE WATER, AND PATTERNING METHOD USING OZONE WATER |
摘要 |
Provided are a method for etching a metal or metal oxide without using a reagent, etc., that affects the environment, a method for smoothing a surface of a metal or metal oxide on an atomic level, and a method for patterning on an atomic level. Etching of a metal or metal oxide, or smoothing of a surface of a metal or metal oxide is possible using ozone water in which only ozone is dissolved. Patterning can also be performed by providing a metal that does not dissolve in the ozone water as a resist on a metal or metal oxide that can be etched by ozone water in which only ozone is dissolved, and etching using the ozone water. |
申请公布号 |
US2015129543(A1) |
申请公布日期 |
2015.05.14 |
申请号 |
US201314396462 |
申请日期 |
2013.04.25 |
申请人 |
Japan Science and Technology Agency |
发明人 |
Yamamoto Takatoki;Hatsuki Ryuji |
分类号 |
C23F1/02 |
主分类号 |
C23F1/02 |
代理机构 |
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代理人 |
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主权项 |
1. A method for etching metal or metal oxide with ozone water of solely ozone dissolved in water. |
地址 |
Kawaguchi-shi, Saitama JP |