REPLACEABLE WAFER SUPPORT BACKSTOP

摘要

A wafer container an enclosure portion including a top wall, a bottom wall, a pair of side walls, a back wall, and a door frame opposite the back wall, the door frame defining a front opening, and a wafer support structure including two side wafer supports 5 each side wafer support including a removable backstop. The invention includes maintaining wafer containers by replacing the removable backstop. The invention includes converting shipping containers that ship large diameter wafers vertically to containers to be used in fabrication facilities that store wafers horizontally for robotic pickup for processing.

主权项

1. A front opening container for large diameter semiconductor wafers comprising:
an enclosure portion including a top wall, a bottom wall with a kinematic coupling disposed thereon, a left side wall and a right side walls, a back wall, and a door frame opposite the back wall, the door frame defining a front opening, and wafer support structure including two side wafer supports, each side wafer support comprising a plurality of spaced vertically aligned wafer shelves, one side wafer support positioned at the left side wall and one positioned at the right side wall, each side wafer support having rearwardly positioned attachment structure for receiving a backstop; a pair of wafer backstops each having cooperating attachment structure of attachment to the rearward attachment structure of each of the wafer support structures, each wafer backstop having a plurality of vertically aligned wafer engagement surfaces corresponding to each of the plurality of wafer shelves.