发明名称 |
LIQUID DISCHARGE DEVICE, LIQUID LEAKAGE INHIBITION METHOD, IMPRINT DEVICE, AND MANUFACTURING METHOD OF COMPONENT |
摘要 |
PROBLEM TO BE SOLVED: To inhibit leakage of a liquid from a head.SOLUTION: A liquid discharge device 1 includes: a head 3 which discharges a liquid 9; a liquid housing unit 4; a liquid filler 11; and pressure adjustment means 12. The liquid housing unit 4 includes: a sealed housing 7; and a flexible member 8 provided in the housing 7. The housing 7 includes: a first housing space communicating with the head 3; and a second housing space which is partitioned from the first housing space by using the flexible member 7. The first housing space houses the liquid 9. The liquid filler 11 fills the second housing space. The pressure adjustment means 12 communicates with the second housing space. The pressure adjustment means 12 adjusts a pressure of the liquid filler 11 filling the second housing space to maintain a negative pressure in the head 3. |
申请公布号 |
JP2015092549(A) |
申请公布日期 |
2015.05.14 |
申请号 |
JP20140188444 |
申请日期 |
2014.09.17 |
申请人 |
CANON INC |
发明人 |
ARAKI YOSHIMASA;TAMURA YASUYUKI;SAITO AKIO;FUKUHARA MAKOTO;OZAKI HIROYUKI |
分类号 |
H01L21/027;B05C5/00;B05C9/12;B05C11/10;B05D1/26;B05D3/00;B41J2/175 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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