| 发明名称 |
DISPENSING APPARATUS HAVING TRANSPORT SYSTEM AND METHOD FOR TRANSPORTING A SUBSTRATE WITHIN THE DISPENSING APPARATUS |
| 摘要 |
A dispenser, which is configured to dispense viscous material on a substrate, includes a frame, a gantry system coupled to the frame, and a dispensing unit coupled to the gantry system. The gantry system is configured to move the dispensing unit in x-axis, y-axis, and z-axis directions. The dispenser further includes a substrate support assembly coupled to the frame and configured to support the substrate to dispense material on the substrate in a dispense position, and a transport system configured to transport the substrate to the dispense position and to remove the substrate from the dispense position. The transport system includes a first pusher assembly configured to move the substrate within the dispenser. A transport system and methods of dispensing material on a substrate are further disclosed. |
| 申请公布号 |
US2015128856(A1) |
申请公布日期 |
2015.05.14 |
| 申请号 |
US201314080174 |
申请日期 |
2013.11.14 |
| 申请人 |
Illinois Tool Works Inc. |
发明人 |
Doyle Dennis G.;Robinson Thomas E. |
| 分类号 |
H01L21/677;B05C13/00 |
主分类号 |
H01L21/677 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A dispenser for dispensing viscous material on a substrate, the dispenser comprising:
a frame; a gantry system coupled to the frame; a dispensing unit coupled to the gantry system, the gantry system being configured to move the dispensing unit in x-axis, y-axis, and z-axis directions; and a substrate support assembly coupled to the frame and configured to support the substrate to dispense material on the substrate in a dispense position; a transport system configured to transport the substrate to the dispense position and to remove the substrate from the dispense position, the transport system including a first pusher assembly configured to move the substrate within the dispenser. |
| 地址 |
Glenview IL US |
