| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for forming different kinds of ceramic films by a liquid phase method on a low heat-resistant substrate. <P>SOLUTION: The method includes: a step of forming a polymide film on a supporter; a step of forming the ceramic film such as ITO or titania on the polymide film by applying a solution of a metal salt such as a metal alkoxide or metal chloride salt to the polymide film and heating it to 500°C or higher; and a step of transferring the ceramic film on the low heat-resistant substrate such as a plastic. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
