发明名称 |
RESIN MOLD FOR IMPRINTING AND METHOD FOR PRODUCING SAME |
摘要 |
Provided is a resin mold for imprinting which is free from transfer defects, has excellent releasability from a resin subjected to imprinting, and does not cause any defect by imprinting. The resin mold for imprinting of the present invention comprises a resin layer having a recessed and projected pattern surface, an inorganic material layer formed with a uniform thickness on at least the recessed and projected pattern surface of the resin layer, and a release agent layer formed with a uniform thickness on at least the recessed and projected pattern surface of the inorganic material layer. |
申请公布号 |
EP2463073(A4) |
申请公布日期 |
2015.05.13 |
申请号 |
EP20100806548 |
申请日期 |
2010.08.06 |
申请人 |
SOKEN CHEMICAL & ENGINEERING CO., LTD. |
发明人 |
MIZAWA, TAKAHIDE;UEHARA, SATOSHI |
分类号 |
B29C33/40;B29C33/42;B29C33/56;B29C59/02;B82Y10/00;B82Y40/00;G03F7/00;H01L21/027 |
主分类号 |
B29C33/40 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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