发明名称 RESIN MOLD FOR IMPRINTING AND METHOD FOR PRODUCING SAME
摘要 Provided is a resin mold for imprinting which is free from transfer defects, has excellent releasability from a resin subjected to imprinting, and does not cause any defect by imprinting. The resin mold for imprinting of the present invention comprises a resin layer having a recessed and projected pattern surface, an inorganic material layer formed with a uniform thickness on at least the recessed and projected pattern surface of the resin layer, and a release agent layer formed with a uniform thickness on at least the recessed and projected pattern surface of the inorganic material layer.
申请公布号 EP2463073(A4) 申请公布日期 2015.05.13
申请号 EP20100806548 申请日期 2010.08.06
申请人 SOKEN CHEMICAL & ENGINEERING CO., LTD. 发明人 MIZAWA, TAKAHIDE;UEHARA, SATOSHI
分类号 B29C33/40;B29C33/42;B29C33/56;B29C59/02;B82Y10/00;B82Y40/00;G03F7/00;H01L21/027 主分类号 B29C33/40
代理机构 代理人
主权项
地址