A method for bonding a pellicle, and a bonding apparatus used in this method

摘要

Here is proposed a method for bonding a pellicle to a stencil such as mask plate, which is characteristic in that the stencilbonding agglutinant layer of the pellicle is warmed under load while the pellicle is being bonded to the stencil, preferably at a temperature in a range of 35 through 80 degrees C, and the load is increased stepwise and with intermittent removal of the load.