| 摘要 |
<p>915,170. Arc torches. WESTINGHOUSE ELECTRIC CORPORATION. Aug. 4, 1960 [Aug. 14, 1959], No. 27016/60. Class 39 (3). [Also in Groups II, XVI and XXXVI] A plasma jet generator, Fig. 1, for use in the manufacture of semi-conductor devices (see Group XXXVI) consists of a gas ionisation chamber 12 and an orifice chamber 14. The chamber walls are of copper, aluminium, graphite or steel but may include parts coated with or formed of ceramic or plastics material. Inert gas introduced under pressure via tube 34 is ionised by an electric arc struck between the edges of aperture 20 and an electrode 24 of tungsten, silver, carbon or alloys or mixtures thereof. The walls of chamber 12 which may be fluid cooled via coil 42 are insulated from the electrode at 26 and the orifice chamber at 27 by ceramic, or filled or unfilled rubber or polytetrafluorethylene. Material in the solid state may be introduced into the plasma jet from one or more containers 40.</p> |
