| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing device capable of efficiently performing annealing treatment, and a semiconductor manufacturing method.SOLUTION: A semiconductor manufacturing device of an embodiment comprises: a susceptor on which a substrate having a grain growing by microwave irradiation at least in a part thereof is formed; an irradiation unit which irradiates the substrate with a microwave; and a control unit which controls the irradiation unit so as to approximate a frequency of the microwave irradiated by the irradiation unit to a resonance frequency of the grain. |
