Cleaning system

摘要

A cleaning system used for removing contaminant particles on a surface of an image sensor is provided. The cleaning system includes an gas blower, two plate electrodes parallel to each other, and a high frequency voltage source. The gas blower supplies a mixed gas to the two plate electrodes. The high frequency voltage source provides a high voltage for the two plate electrodes to ionize the mixed gas, thereby the ionized gas cause contaminant particles on the surface of the image sensor to be positively charged, and cause the surface of the image sensor to be positively charged. The vacuum pump device removes the positively charged particles, which are repelled by the positively charged surface of the image sensor.

主权项

1. A cleaning system for removing contaminant particles on a surface of an image sensor, comprising:
a gas blower configured to blow a mixed gas; two plate electrodes parallel to each other, the plate electrodes cooperatively defining a gas channel for allowing the mixed gas to pass therethrough; a high frequency voltage source configured to apply a high voltage to the two plate electrodes to ionize the mixed gas, thereby the ionized gas cause contaminant particles on the surface of the image sensor to be positively charged, and cause the surface of the image sensor to be positively charged; a vacuum pump device arranged adjacent to the two plate electrodes, and configured to remove the positively charged particles, which are repelled by the positively charged surface of the image sensor; and at least one high voltage electrode arranged adjacent to the vacuum pump device, and configured to ionize external air introduced by the vacuum pump device; wherein the vacuum pump device is further configured to remove the ionized air.