Method of using deformable mirror using piezoelectric actuators formed as an integrated circuit

摘要

A deformable optical device includes a reflection device having a first reflecting surface and a second surface, an actuator (e.g., an integrated circuit piezoelectric actuator) having a support device and moveable extensions extending therefrom, which are coupled to the second surface, and electrodes coupled to corresponding ones of the extensions. Wavefront aberrations are detected and used to generate a control signal. The extensions are moved based on the control signal. The movement deforms the reflecting surface to correct the aberrations in the wavefront.

主权项

1. A method comprising:
detecting wavefront aberrations; generating a control signal based on the detected aberration; moving extensions of a piezoelectric actuator based on the control signal; deforming a reflector based on the moving of the extensions to correct the aberrations in the wavefront; measuring a change in capacitance of the extensions; and verifying the deformation of the reflector based on the measured change in capacitance.