| 主权项 |
1. A vibrating element comprising:
a piezoelectric substrate including
an excitation section adapted to excite a thickness-shear vibration, and provided with a step section in each of side surfaces on both ends of the excitation section, the excitation section having principal surfaces, the step section including a first surface and a second surface each extending in a direction perpendicular to the principal surfaces of the excitation section, and having a third surface extending parallel to the principal surfaces of the excitation section, the third surface disposed between the first surface and the second surface, the excitation section having a rectangular shape, the step section being disposed on each of the side surfaces at one both ends of the excitation section, anda peripheral section having a thickness smaller than a thickness of the excitation section, the peripheral section having at least one projection section disposed on both principal surfaces of the projection section in an area where a vibratory displacement when the excitation section excites a vibration is sufficiently attenuated, the projection section being disposed on the other end across the excitation section from the pads; excitation electrodes disposed respectively on the obverse and reverse principal surfaces of the excitation section; extraction electrodes extending from the respective excitation electrodes toward one end of the peripheral section; and pads electrically connected to the respective extraction electrodes and disposed in the one end of the peripheral section, assuming that in an orthogonal coordinate system composed of an X axis as an electrical axis, a Y axis as a mechanical axis, and a Z axis as an optical axis, which are crystal axes of a quartz crystal, an axis obtained by tilting the Z axis toward a −Y direction of the Y axis around the X axis is a Z′ axis, and an axis obtained by tilting the Y axis toward a +Z direction of the Z axis around the X axis is a Y′ axis, the piezoelectric substrate is a quartz crystal substrate composed of planes parallel to the X axis and the Z′ axis and having a thickness in a direction parallel to the Y′ axis, the one both ends of the excitation section are parallel to the Z′ axis, and the projection section is disposed along an edge along the Z′ axis, assuming that a dimension of the quartz crystal substrate in a direction parallel to the Z′ axis is Z, a dimension of a short side of the excitation section is Mz, and a thickness of the excitation section is t,
8≦Z/t≦11, and 0.6≦Mz/Z≦0.8are fulfilled. |
