Inspection device, inspection method and non-transitory storage medium for inspecting deformation of substrate holding member, and substrate processing system including the inspection device

摘要

Disclosed is an inspection device for inspecting deformation of a substrate holding member of a substrate transport apparatus. The substrate holding member is moved in the forward-and-backward direction relative to the transport base to pass across a light path of the detection light formed by an optical detection unit. The position, with respect to a direction transverse to the forward-and-backward direction, of the substrate holding member is detected based on a detection signal of the optical detection unit. Based on a correlation data expressing the relationship between a first parameter indicative of a change of a position of the substrate holding member with respect to the forward-and-backward direction and a second parameter indicative of the change of the position of the substrate holding member with respect to the direction transverse to the forward-and-backward direction, whether or not deformation occurs in the substrate holding member is judged.

主权项

1. An inspection device for inspecting deformation of a substrate holder of a substrate transport apparatus, the substrate transport apparatus having a transport base and a drive unit for horizontally moving the substrate holder in a forward-and-backward direction relative to the transport base, said inspection device comprising:
an optical detection unit having a light emitter and a light receiver, the optical detection unit being configured to emit by the light emitter a detection light to the substrate holder, configured to receive by the light receiver the detection light affected by the substrate holder thereby to output a detection signal that varies depending on a change of a position of the substrate holder with respect to a direction transverse to the forward-and-backward direction, the optical detection unit being disposed at a location that allows the substrate holder to pass across a light path of the detection light emitted from the light emitter by moving the substrate holder in the forward-and-backward direction; and a data acquiring unit configured to acquire correlation data based on the detection signal obtained when the substrate holder is moving in the forward-and-backward direction to pass across the light path of the detection light emitted from the light emitter, the correlation data expressing a relationship between a first parameter indicative of a change of a position of the substrate holder with respect to the forward-and-backward direction and a second parameter indicative of the change of the position of the substrate holder with respect to the direction transverse to the forward-and-backward direction, whereby whether or not deformation occurs in the substrate holder can be judged based on the correlation data.