Method for plugging a hole

摘要

A method for at least partially inserting a plug into a hole, said method comprising the steps of a) providing a at least one substrate with at least one hole wherein said at least one hole has a largest dimension of from 1 μm to 300 μm, b) providing a piece of material, wherein said piece of material has a larger dimension than said at least one hole, c) pressing said piece of material against the hole with a tool so that a plug is formed, wherein at least a part of said piece of material is pressed into said hole, d) removing the tool from the piece of material. There is further disclosed a plugged hole manufactured with the method. One advantage of an embodiment is that an industrially available wire bonding technology can be used to seal various cavities. The existing wire bonding technology makes the plugging fast and cheap.

主权项

1. A method for at least partially inserting a plug into a hole, said method comprising the steps of:
a) providing at least one substrate with at least one hole wherein said at least one hole has a largest dimension of from 1 μm to 300 μm, b) providing a piece of material, wherein said piece of material has a larger dimension than said at least one hole, c) pressing said piece of material against the substrate centred on a point adjacent to the hole, with a first tool, d) removing the tool from the piece of material, and e) additionally pressing said piece of material at least partially into the hole with a flat tool operating in a pressure controllable chamber, wherein said at least one hole is the opening of a cavity, and wherein said cavity is filled with a fluid before forming said plug.