| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a printhead device that allows operation at elevated temperatures to improve the frequency response.SOLUTION: Provided is a thermo-pneumatic actuator which can include an insulating layer 14 formed on a substrate 12, a working fluid 60 disposed in a fluid chamber 40, an ink chamber 56 separated from the fluid chamber by at least a portion of a device layer comprising an actuatable membrane 32, and a heating element 16 formed between the insulating layer and the fluid chamber. A boiling point temperature of the working fluid in the fluid chamber is in the range greater than about 100°C to about 500°C.</p> |
