| 摘要 |
PROBLEM TO BE SOLVED: To perform laser irradiation by using a linear laser spot by generating neither a part with a lack of strength nor a part with an excess of strength.SOLUTION: A plurality of X-directional parallel scan lines arranged at scan line intervals Py in the y direction to turn a linear laser spot (W) longitudinally in a y direction, and a processing target is irradiated with laser beams at every irradiation position of width direction pitch Λ while the laser spot is being relatively moved to the same. At this time, an irradiation position on an adjacent scan line is displaced by a positional displacement &Dgr;x in the x direction, and the scan line interval Py, the width direction pitch Λ, and the positional displacement &Dgr;x are decided so that cumulative values of irradiating laser strengths may be nearly equal. Therefore, no difference appears between profile overlapping quantities on an extension line of the major axis Cy at an irradiation position on an odd-numbered scan line and profile overlapping quantities on an extension line of the intermediate axis My at an irradiation position on an odd-numbered scan line, so that laser irradiation can be performed with the linear laser spot (W) by generating neither a part with a lack of strength nor a part with an excess of strength. |
