发明名称 A PHOTO MASK AND THE METHOD OF MAKING THE SAME, THE METHOD OF MAKING TRENCHES BY USING THE PHOTO MASK
摘要 The present invention is to provide a photo mask capable of forming a trench synchronously for preventing a leakage of underfill in a process of forming an opening part of a solder resist. The photo mask comprises: a transparent base material formed with a non-transparent film on one surface; a semi-transparent area formed on the transparent base material by a selective etching by a laser; and a transparent area and a non-transparent area formed on the transparent base material together with the semi-transparent area, thereby forming an opening part of a solder resist, and a trench for preventing a leakage of underfill fluid or an EMC mold by using a photo mask.
申请公布号 KR20150049997(A) 申请公布日期 2015.05.08
申请号 KR20130131273 申请日期 2013.10.31
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 HONG, DAE JO;LEE, OH HI;CHO, SOON JIN
分类号 G03F1/22;H01L21/027;H01L21/3205;H01L21/60 主分类号 G03F1/22
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