发明名称 |
A PHOTO MASK AND THE METHOD OF MAKING THE SAME, THE METHOD OF MAKING TRENCHES BY USING THE PHOTO MASK |
摘要 |
The present invention is to provide a photo mask capable of forming a trench synchronously for preventing a leakage of underfill in a process of forming an opening part of a solder resist. The photo mask comprises: a transparent base material formed with a non-transparent film on one surface; a semi-transparent area formed on the transparent base material by a selective etching by a laser; and a transparent area and a non-transparent area formed on the transparent base material together with the semi-transparent area, thereby forming an opening part of a solder resist, and a trench for preventing a leakage of underfill fluid or an EMC mold by using a photo mask. |
申请公布号 |
KR20150049997(A) |
申请公布日期 |
2015.05.08 |
申请号 |
KR20130131273 |
申请日期 |
2013.10.31 |
申请人 |
SAMSUNG ELECTRO-MECHANICS CO., LTD. |
发明人 |
HONG, DAE JO;LEE, OH HI;CHO, SOON JIN |
分类号 |
G03F1/22;H01L21/027;H01L21/3205;H01L21/60 |
主分类号 |
G03F1/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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