| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a force detection device, a robot, an electronic component conveyance device, an electronic component inspection device, and a component processing device which are capable of reducing the device size and improving the accuracy of force detection.SOLUTION: A force detection device 1 comprises: a first base 2; an element 10(6) for outputting a signal in accordance with external force; a second base 3 for providing the element 10(6) between the first base 2 and itself; a first temperature sensor 7a, provided in the first base 2, for detecting a temperature Tb of the first base 2; a second temperature sensor 7b, provided in the second base 3, for detecting a temperature Tc of the second base 3; and an external force detection circuit 40 for detecting the external force on the basis of the signal outputted from the element 10(6), the output of the first temperature sensor 7a, and the output of the second temperature sensor 7b.</p> |
