| 发明名称 |
Sensor Protective Coating |
| 摘要 |
A method of fabricating a sensor device includes forming a plurality of sensor structures on a wafer, covering the plurality of sensor structures with a polymer layer, and dicing the wafer into a plurality of die while each sensor structure remains covered by the polymer layer. |
| 申请公布号 |
US2015123222(A1) |
申请公布日期 |
2015.05.07 |
| 申请号 |
US201314069633 |
申请日期 |
2013.11.01 |
| 申请人 |
Bilic Dubravka;Hooper Stephen R. |
发明人 |
Bilic Dubravka;Hooper Stephen R. |
| 分类号 |
B81C1/00;B81B7/00 |
主分类号 |
B81C1/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of fabricating a sensor device, the method comprising:
forming a plurality of sensor structures on a wafer; covering the plurality of sensor structures with a polymer layer; and dicing the wafer into a plurality of die while each sensor structure remains covered by the polymer layer. |
| 地址 |
Scottsdale AZ US |
